Hefei Kaiyue Deploys Flagship 12-Inch Coater-Developer to Advance Lithography Self-Reliance

In a significant step toward domestic semiconductor equipment self-sufficiency, China’s Hefei Kaiyue Semiconductor Technology Co., Ltd. has delivered its flagship CRYSTAL TRACK Rubi 3 12-inch inline coater-developer to a major domestic memory chip manufacturer. The deployment marks a critical advancement for China’s front-end semiconductor manufacturing ecosystem, addressing a vital supply chain segment where domestic alternatives have long faced high technical barriers. Coater-developer machines, known as tracks, work in tandem with lithography systems to handle essential wafer processing steps including photoresist coating, thermal baking, and chemical development. Founded in 2016 and headquartered in Hefei, Kaiyue Semiconductor transitioned from equipment maintenance services…